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High Accuracy Surface Profile Sensor Based on a Two Lens System
journal contribution
posted on 2023-06-07, 23:17 authored by Phil BirchPhil Birch, Gongde Li, Frederic Claret-Tournier, Rupert YoungRupert Young, Chris ChatwinChris ChatwinTwo optical lenses are used to compose a surface position measuring system. A measurand is positioned near the front focal point of the first lens. At the output end of the other lens, a beam splitter is used to split the beam into two paths. One photodetector is positioned before the focal point of the lens in one path and another after the focal point in the other so that the intensities falling onto the two detectors can be adjusted to be equal when the first lens is in focus. This device provides a compact and high-accuracy surface sensor. In this paper, the design and experimental study of the sensor system is described. It is shown that such a sensor embodiment can lead to a resolution of 1 µm.
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Publication status
- Published
Journal
Optics and Lasers in EngineeringISSN
0143-8166External DOI
Issue
6Volume
41Page range
919-926Pages
8.0Department affiliated with
- Engineering and Design Publications
Full text available
- No
Peer reviewed?
- Yes
Legacy Posted Date
2012-02-06Usage metrics
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