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CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology

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posted on 2023-06-09, 05:49 authored by Chris ChatwinChris Chatwin
Lecture describing the lithography, CMOS fabrication of an inverter to demonstrate Integrated Micro-Electro-Mechanical Systems (MEMS)

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  • Published

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  • Published version

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University of Sussex

Department affiliated with

  • Engineering and Design Publications

Research groups affiliated with

  • Industrial Informatics and Signal Processing Research Group Publications

Full text available

  • Yes

Legacy Posted Date

2017-04-19

First Open Access (FOA) Date

2017-04-19

First Compliant Deposit (FCD) Date

2017-04-19

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