Chatwin, Chris R (2017) CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]

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Abstract

Lecture describing the lithography, CMOS fabrication of an inverter to demonstrate Integrated Micro-Electro-Mechanical Systems (MEMS)

Item Type:	Teaching Resource
Keywords:	CMOS fabrication, Lithography, Micro electro-mechanical systems, MEMS
Schools and Departments:	School of Engineering and Informatics > Engineering and Design
Research Centres and Groups:	Industrial Informatics and Signal Processing Research Group
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics T Technology > TJ Mechanical engineering and machinery > TJ0210.2 Mechanical devices and figures. Automata. Ingenious mechanisms. Robots (General) T Technology > TS Manufactures
Depositing User:	Chris Chatwin
Date Deposited:	19 Apr 2017 08:17
Last Modified:	25 Apr 2017 12:08
URI:	http://sro.sussex.ac.uk/id/eprint/67418

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