Tools
Chatwin, Chris R (2017) CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]
![]() |
PDF
- Published Version
Download (2MB) |
Abstract
Lecture describing the lithography, CMOS fabrication of an inverter to demonstrate Integrated Micro-Electro-Mechanical Systems (MEMS)
Item Type: | Teaching Resource |
---|---|
Keywords: | CMOS fabrication, Lithography, Micro electro-mechanical systems, MEMS |
Schools and Departments: | School of Engineering and Informatics > Engineering and Design |
Research Centres and Groups: | Industrial Informatics and Signal Processing Research Group |
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics T Technology > TJ Mechanical engineering and machinery > TJ0210.2 Mechanical devices and figures. Automata. Ingenious mechanisms. Robots (General) T Technology > TS Manufactures |
Depositing User: | Chris Chatwin |
Date Deposited: | 19 Apr 2017 08:17 |
Last Modified: | 25 Apr 2017 12:08 |
URI: | http://sro.sussex.ac.uk/id/eprint/67418 |
View download statistics for this item
📧 Request an update