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High Accuracy Surface Profile Sensor Based on a Two Lens System

journal contribution
posted on 2023-06-07, 23:17 authored by Phil BirchPhil Birch, Gongde Li, Frederic Claret-Tournier, Rupert YoungRupert Young, Chris ChatwinChris Chatwin
Two optical lenses are used to compose a surface position measuring system. A measurand is positioned near the front focal point of the first lens. At the output end of the other lens, a beam splitter is used to split the beam into two paths. One photodetector is positioned before the focal point of the lens in one path and another after the focal point in the other so that the intensities falling onto the two detectors can be adjusted to be equal when the first lens is in focus. This device provides a compact and high-accuracy surface sensor. In this paper, the design and experimental study of the sensor system is described. It is shown that such a sensor embodiment can lead to a resolution of 1 µm.

History

Publication status

  • Published

Journal

Optics and Lasers in Engineering

ISSN

0143-8166

Issue

6

Volume

41

Page range

919-926

Pages

8.0

Department affiliated with

  • Engineering and Design Publications

Full text available

  • No

Peer reviewed?

  • Yes

Legacy Posted Date

2012-02-06

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