http://sro.sussex.ac.uk/ http://sro.sussex.ac.uk/images/sitelogo.png http://sro.sussex.ac.uk/ Sun, 26 Nov 2023 03:41:22 +0000 Sun, 26 Nov 2023 03:41:22 +0000 en Mon, 06 Feb 2012 18:54:27 +0000 http://sro.sussex.ac.uk/id/eprint/18862/ http://sro.sussex.ac.uk/id/eprint/18862/ Miao, Jianmin, Weiss, Bernard L and Hartnagel, Hans L (2003) Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation. Journal of Micromechanics and Microengineering, 13 (1). pp. 35-39. ISSN 0960-1317