Micro-Electro-Mechanical Systems (MEMS) technology

Chatwin, Chris R (2017) Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]

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Abstract

Lecture on Micro Elecrto-Mechanical Systems manufacture. Examples of its application to product manufacture are given.

Item Type: Teaching Resource
Keywords: Micro Electro-mechanical Systems, MEMS, MEMS devices, micro-turbomachinery, smart dust, motes, MEMS optical switches
Schools and Departments: School of Engineering and Informatics > Engineering and Design
Research Centres and Groups: Industrial Informatics and Signal Processing Research Group
Subjects: T Technology > TA Engineering (General). Civil engineering (General) > TA0165 Engineering instruments, meters, etc. Industrial instrumentation
T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials
T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics
T Technology > TS Manufactures
Depositing User: Chris Chatwin
Date Deposited: 19 Apr 2017 08:18
Last Modified: 19 Apr 2017 08:18
URI: http://sro.sussex.ac.uk/id/eprint/67419

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