CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology

Chatwin, Chris R (2017) CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology. [Teaching Resource]

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Abstract

Lecture describing the lithography, CMOS fabrication of an inverter to demonstrate Integrated Micro-Electro-Mechanical Systems (MEMS)

Item Type: Teaching Resource
Keywords: CMOS fabrication, Lithography, Micro electro-mechanical systems, MEMS
Schools and Departments: School of Engineering and Informatics > Engineering and Design
Research Centres and Groups: Industrial Informatics and Signal Processing Research Group
Subjects: T Technology > TA Engineering (General). Civil engineering (General) > TA0401 Materials of engineering and construction. Mechanics of materials
T Technology > TA Engineering (General). Civil engineering (General) > TA1501 Applied optics. Photonics
T Technology > TJ Mechanical engineering and machinery > TJ0210.2 Mechanical devices and figures. Automata. Ingenious mechanisms. Robots (General)
T Technology > TS Manufactures
Depositing User: Chris Chatwin
Date Deposited: 19 Apr 2017 08:17
Last Modified: 25 Apr 2017 12:08
URI: http://sro.sussex.ac.uk/id/eprint/67418

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