Increased surface flashover voltage in microfabricated devices

Sterling, R C, Hughes, M D, Mellor, C J and Hensinger, W K (2013) Increased surface flashover voltage in microfabricated devices. Applied Physics Letters, 103 (14). p. 143504. ISSN 0003-6951

[img]
Preview
PDF - Published Version
Download (961kB) | Preview

Abstract

With the demand for improved performance in microfabricated devices, the necessity to apply greater electric fields and voltages becomes evident. When operating in vacuum, the voltage is typically limited by surface flashover forming along the surface of a dielectric. By modifying the fabrication process, we have discovered it is possible to more than double the flashover voltage. Our finding has significant impact on the realization of next-generation micro- and nano-fabricated devices and for the fabrication of on-chip ion trap arrays for the realization of scalable ion quantum technology.

Item Type: Article
Keywords: flashover, microfabrication, micromechanical devices, nanoelectromechanical devices, nanofabrication
Schools and Departments: School of Mathematical and Physical Sciences > Physics and Astronomy
Subjects: Q Science > QC Physics > QC0170 Atomic physics. Constitution and properties of matter Including molecular physics, relativity, quantum theory, and solid state physics
Depositing User: Winfried Hensinger
Date Deposited: 07 Oct 2013 15:48
Last Modified: 07 Mar 2017 09:55
URI: http://sro.sussex.ac.uk/id/eprint/45127

View download statistics for this item

📧 Request an update