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Microfabrication by use of a Spatial Light Modulator in the Ultraviolet: Experimental results

journal contribution
posted on 2023-06-08, 05:02 authored by Maria Farsari, Shiping Huang, Phil Birch, Frederic Claret-Tournier, Rupert YoungRupert Young, David Budgett, Chris Bradfield, Chris ChatwinChris Chatwin
We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.

History

Publication status

  • Published

Journal

Optics Letters

ISSN

0146-9592

Publisher

Optics Letters

Issue

8

Volume

24

Page range

549-550

ISBN

0146-9592

Department affiliated with

  • Engineering and Design Publications

Full text available

  • No

Peer reviewed?

  • Yes

Legacy Posted Date

2012-02-06

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