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Microfabrication by use of a Spatial Light Modulator in the Ultraviolet: Experimental results
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posted on 2023-06-08, 05:02 authored by Maria Farsari, Shiping Huang, Phil Birch, Frederic Claret-Tournier, Rupert YoungRupert Young, David Budgett, Chris Bradfield, Chris ChatwinChris ChatwinWe report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.
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Publication status
- Published
Journal
Optics LettersISSN
0146-9592Publisher
Optics LettersExternal DOI
Issue
8Volume
24Page range
549-550ISBN
0146-9592Department affiliated with
- Engineering and Design Publications
Full text available
- No
Peer reviewed?
- Yes
Legacy Posted Date
2012-02-06Usage metrics
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