Microfabrication by use of a Spatial Light Modulator in the Ultraviolet: Experimental results

Farsari, Maria, Huang, Shiping, Birch, Phil, Claret-Tournier, Frederic, Young, Rupert, Budgett, David, Bradfield, Chris and Chatwin, Chris (1999) Microfabrication by use of a Spatial Light Modulator in the Ultraviolet: Experimental results. Optics Letters, 24 (8). pp. 549-550. ISSN 0146-9592

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Abstract

We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.

Item Type: Article
Schools and Departments: School of Engineering and Informatics > Engineering and Design
Depositing User: Rupert Young
Date Deposited: 06 Feb 2012 20:07
Last Modified: 30 Mar 2012 13:47
URI: http://sro.sussex.ac.uk/id/eprint/24119
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